Transparent conducting oxide (TCO) films have been widely used as transparent electrodes in the optoelectronic devices such as flat panel displays and thin-film solar cells. Among them, Al-doped ZnO (AZO) films are being studied most due to their rich resources of Al and good electrical and optical properties.
The sputtering ambient has an influence on the microstructure, composition and electrical and optical properties of ZnO based films deposited by sputtering.
Some studies showed that adding appropriate amount of H2 into sputtering ambient leads to enhancement of the electrical properties of films. This encouraged many attempts to improve the properties of doped ZnO films by adding H2. However, there is little literature that dealt with the effects of H2 content on the properties of doped ZnO films deposited at low temperature and at high temperature.
Ri Kang Hyon, a section head at the Faculty of Material Science and Technology, compared the influence of H2 addition to sputtering ambient on the microstructural and electrical properties of AZO films deposited by r.f. magnetron sputtering at low temperature (100 ℃) and high temperature (400 ℃).
The results showed that for the AZO films prepared at comparatively low temperature around 100 ℃, small addition of H2 to sputtering ambient was favorable for enhancing the electrical properties of films, but for those at high temperature around 400℃, any addition of H2 was unfavourable at all.
For more information, please refer to his paper “Influence of hydrogen addition to sputtering ambient on the properties of AZO films deposited by sputtering” in “Physica Scripta” (SCI).
...